Model 2008

6”/8” Manual Wafer Probe Station Model 2008

Features & Specifications:

• Primarily constructed of black anodized aluminum and stainless steel for rugged dependability
• Compact size and small footprint:

                 Height = 17”    Depth = 19”     Width = 20”

• Manual stage provides a full 8” of travel for both X and Y axis and 90 degrees of rotation

                 Mechanical drive ratios: Y-Axis = 19.8:1  X-Axis = 3.25:1   Rotation – 1:1

                 Planarization: Adjustable to better than 0.0005” over chuck surface

• Vacuum actuated chuck, gold plated or stainless steel – 6” or 8” chuck available

                 Flatness: +/- 0.0001”

• Pull-out stage provides easy and clear access for loading/unloading wafers
• Eccentirc-drive lift mechanism provides ¼” of travel with smooth, no-bounce probe contact.

                 Repeatability: +/- 0.0001”

• Micrometer adjustable over travel for control of probe compression

                 Graduations: 0.001”   Accuracy: 0.0001”

• Unique 3-point clamps allow for rotational alignment of probe array and quick change of rings
• Leveling pads allow for secure and level adjustment to mounting surface
• Ring insert accepts up to 12 individual probe positioners or standard 4-1/2” probe card
• Optional air shock anti-vibration mounting for high magnification applications
• Optional fine theta adjust provides high resolution for rotational alignment
• Optional X-Y microscope movement

                 X Travel = +/- 1” (2” Total”)   Y Travel = +/- 1” (2” Total”)

• Optional Nickel plated ring for mounting magnetic or vacuum base probe positioners
• Optional focus block can be configured for mounting optical or video microscopes

                 Mechanical drive ratio of 280:1 eliminates the need for separate coarse and

     fine focus