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K & Us Equipment, Inc., 13350 West
Park Ave., Ste B, Boulder Creek, CA 95006-9333, USA | Phone (831)
338-7246, Fax (831) 338-7962 | Contact www.kandus.com
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Hitachi
S-9300 CD SEM
Wafer Size:
200mm/300mm
- Electron Optical
System: Electron Gun: Schottky emission source
- Accelerating
Voltage: 500V to 1600V, 10V steps
- Probe current:
4~24pA with auto setting
- Electromagnetic
Lens: 3-Stage Electromagnetic Lens System with boosting voltage
- Objective Lens:
4-opening click stop, heated aperture is selectable/adjustable outside the
vacuum
- Scan Coil:
2-Stage Electromagnetic deflection control
- Field control:
continuously on for sample de-charging at all voltages
- OM: magnification
110X
- SE Magnification
= 1000X to > 300,000X
- Wafer Imaging
Ability: Entire Surface of 12” wafer
- Resolution: 3nm
(at 800V)
- X/Y coverage
from 5 – 295nm, notch down
- Field of view:
1.2mm
- Workstation:
Model HP B180L (9GB)
- O/S: Unix version
HP-UX 10.20
- SECS/GEM
communication interface
- DSP Image
Processing
- BSE Mode
Functionality
- Multipoint Measurement Function
- Edge Roughness
Function
- Auto image
archiving.
Installation and Traning Available
Hitachi S-9300 CD SEM
Price: CALL
Ref# 35433kk
Request
a Quote Contact
Us
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K & Us Equipment, Inc., 13350 West Park Ave., Ste B,
Boulder Creek, CA 95006-9333, USA | Phone (831) 338-7246, Fax (831)
338-7962 | Contact www.kandus.com
Copyright © 2010 K & Us
Equipment, Inc. All Rights Reserved |
