 
Electroglas EG5 300 Wafer Prober
Electroglas EG 5/300 Wafer Prober
S/N: S503020078
12" (300mm) Chuck
300MM capable of +/- 1.0 micron stepping accuracy
Electroglas EG 5/300 is designed for extremely tight-pitch leading edge devices.
This system is configured with an Asyst VersaPort, an Asyst SMIF300-FL
and an Electroglas EG HLM High Load Hinged Testhead Manipulator. This
prober set-up can be purchased as a complete unit or individual
equipment pieces can be purchased separately.
The EG5/300 Wafer Prober along with the Asyst and manipulator available
immediately with a 30 Day Right of Return. The Electroglas 5/300 Prober
and the Asyst Load Port were deinstalled per OEM specifications.
Additional information:
#36125 ASYST VersaPort 2200 STD and SMIF 300FL
Material Handler and Load Port
This system includes both the ASYST VersaPort 2200 STD module and the
ASYST SMIF-300FL module. The system was deinstalled per OEM
specifications. Originally interfaced with an Electroglas 5/300 wafer
prober.
ASYST VersaPort 2200 STD
P/N: 9700-5384-01 Rev. 005
Vintage: 05/07/2001
S/N: 00-0602-03044
ASYST SMIF-300FL
Model No: FA300FL,S2.1 25WFR
P/N:9700-5158-01 Rev. C
Vintage: 12/23/2000
S/N: 3801-02714
The ASYST VersaPort 2200 is the industry's most advanced standard
mechanical interface (SMIF) I/O processing tool with loadport opener.
While designed as a "bridge tool" for 200mm to 300mm transitions, the
VersaPort 2200 also offers a solution for open cassete to SMIF I/O
processing.
The ASYST VersaPort 2200 is ergonomically designed to easily integrate
the SMIF contamination control technology for unloading and loading all
200mm SMIF-Pods (TM). The ASYST VersaPort 2200 is also the industry's
most advanced 200mm BOLTS compliant loadport opener. The ASYST
VersaPort 2200 performs unloading and loading of all 200mm
SMIF-Pods(TM) to 300mm class tools.
The ASYST SMIF 300-FL is designed to serve as an input/output device
for loading wafers into the process tool, mapping the positon of wafers
and communicating with the host server. The ASYST SMIF 300-FL key
features include built-in E-84 functionality, the automation
communication standard used in the semiconductor industry, which
reduces the software workload of the OEM tool supplies. The ASYST SMIF
300-FL also includes reliable wafer mapping to ensure an accurate wafer
count, as well as ensure that the wafers are properly seated in the
SMIF-Pod(TM) before transferring the wafers to the process tool. In
addition, The ASYST SMIF 300-FL has a superior reliability of greater
than 500,000 mean cycles before failure (MCBF).
#36126 Electroglas HLM
Electroglas High Load Hinged Testhead Manipulator
S/N: HCM01052032
The Electroglas High-Load Hinged Testhead Manipulator has successfully
delivered repeatable docking on hundreds of systems worldwide. The EG
HLM provides a safe, effective way to maneuver large test heads.
The Electroglas HLM Hinged Testhead Manipulator fits very efficiently
with EG Horizon Series probers and can be configured to fit any 200mm
or 300mm wafer prober from Electroglas Horizon or other major wafer
prober manufacturers.
This manipulator was originally interfaced with an Electroglas 5/300 wafer prober.
Price: Inquier
Ref# 36074dm
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